Effect of neutral gas heating on the wave magnetic fields of a low pressure 13.56 MHz planar coil inductively coupled argon discharge

Chin, Oi-Hoong (2014) Effect of neutral gas heating on the wave magnetic fields of a low pressure 13.56 MHz planar coil inductively coupled argon discharge. Physics of Plasmas, 21 (4). 043510.

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Item Type: Article
Uncontrolled Keywords: Effect of neutral gas heating on the wave magnetic fields of a low pressure 13.56 MHz planar coil
Subjects: Q Science
Depositing User: MR. ADNAN YAHYA
Date Deposited: 11 Dec 2015
Last Modified: 23 Dec 2015
URI: http://repository.um.edu.my/id/eprint/106860

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