Chemical wet etching of silicon wafers from a mixture of concentrated acids

Basirun, W. J. (2011) Chemical wet etching of silicon wafers from a mixture of concentrated acids. Advance Material Research. pp. 1027-1032.

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Abstract

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Item Type: Article
Uncontrolled Keywords: Chemical wet etching of silicon wafers from a mixture of concentrated acids
Subjects: Q Science
Depositing User: MR. ADNAN YAHYA
Date Deposited: 02 Apr 2011
Last Modified: 24 Jul 2011
URI: http://repository.um.edu.my/id/eprint/12001

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