Polysilicon Nanogap Fabrication Using a Thermal Oxidation Process

Ali, M.E. (2012) Polysilicon Nanogap Fabrication Using a Thermal Oxidation Process. Microelectronics International, 29 (1). pp. 40-46.

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Abstract

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Item Type: Article
Uncontrolled Keywords: Polysilicon Nanogap Fabrication Using a Thermal Oxidation Process
Subjects: Q Science
Depositing User: MR. ADNAN YAHYA
Date Deposited: 02 Jul 2012
Last Modified: 02 Jul 2012
URI: http://repository.um.edu.my/id/eprint/22180

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