Effects of Oxidation Temperature on Electrical and Physical Properties of Sputtered Zr Thin Film Based on Si in N2O Ambient

HOONG, WONG YEW (2011) Effects of Oxidation Temperature on Electrical and Physical Properties of Sputtered Zr Thin Film Based on Si in N2O Ambient. UNSPECIFIED.

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Item Type: Other
Uncontrolled Keywords: Effects of Oxidation Temperature on Electrical and Physical Properties of Sputtered Zr Thin Film
Subjects: University Structure > Faculty of Engineering, Science and Mathematics > School of Engineering Sciences
Depositing User: MR. ADNAN YAHYA
Date Deposited: 13 Mar 2013
Last Modified: 13 Jun 2013
URI: http://repository.um.edu.my/id/eprint/27684

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