Thermal oxidation and nitridation of sputtered Zr thin film on Si via N2O gas

HOONG, WONG YEW (2011) Thermal oxidation and nitridation of sputtered Zr thin film on Si via N2O gas. journal of alloys and compounds, 509. pp. 8728-8737.

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Abstract

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Item Type: Article
Uncontrolled Keywords: Thermal oxidation and nitridation of sputtered Zr thin film on Si via N2O gas
Subjects: University Structure > Faculty of Engineering, Science and Mathematics > School of Engineering Sciences
Depositing User: MR. ADNAN YAHYA
Date Deposited: 05 Mar 2013
Last Modified: 04 Oct 2014
URI: http://repository.um.edu.my/id/eprint/28506

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