Highly reflective nc-Si:H/a-CNx:H multilayer films prepared by r.f. PECVD technique

Sharif, Khairul Anuar Mat and Muhamad, Muhamad Rasat and R., Ritikos, and S.A., Ritikos, R., Goh, B.T., Mat Sharif, K.A., Muhamad, M.R., Rah and Rahman, Saadah Abdul (2009) Highly reflective nc-Si:H/a-CNx:H multilayer films prepared by r.f. PECVD technique. Thin Solid Films, 517 (17). pp. 5092-5095.

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Abstract

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Item Type: Article
Uncontrolled Keywords: Highly reflective nc-Si:H/a-CNx:H multilayer films prepared by r.f. PECVD technique
Subjects: Q Science
Depositing User: MR. ADNAN YAHYA
Date Deposited: 07 Oct 2009
Last Modified: 02 Mar 2013
URI: http://repository.um.edu.my/id/eprint/5481

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