Surface Modification of Semiconductor by Simultaneous Thermal Oxidation and Nitridation

HOONG, WONG YEW (2015) Surface Modification of Semiconductor by Simultaneous Thermal Oxidation and Nitridation. In: Handbook of Manufacturing Engineering and Technology. Springer, p. 33. ISBN 978-1-4471-4669-8

[img] PDF
1-4471-4670-4_47.pdf

Download (38kB)

Abstract

-

Item Type: Book Section
Uncontrolled Keywords: Surface Modification of Semiconductor by Simultaneous Thermal Oxidation and Nitridation
Subjects: University Structure > Faculty of Engineering, Science and Mathematics > School of Engineering Sciences
Depositing User: MR. ADNAN YAHYA
Date Deposited: 07 Dec 2014
Last Modified: 07 Dec 2014
URI: http://repository.um.edu.my/id/eprint/93117

Actions (login required)

View Item View Item